Automatic Generation System of Capacitive MEMS Accelerometers

This paper proposes an automatic generation system of capacitive MEMS accelerometers. In the system, capacitance of MEMS accelerometers is calculated by using a computational model without computationally heavy simulation. We fabricated MEMS accelerometers according to the generated parameters to evaluate the proposed system. Unfortunately, small change in differential capacitances of fabricated MEMS sensors was observed when acceleration was applied because of some failures during fabrication process. However, we believe that the results of this study can be exploited in the automatic generation system to automatically generate parameters for accelerometers that can be used for actual measurements.