Mechanical Contact Type RF-MEMS Switches for Microwave Band Applications

This paper presents the design and fabrication of two-state mechanical-contact type electrostatically-actuated MEMS switches for micro-wave band application. The switch designs presented in this paper are based on those presented in previous work, with further optimization: (i) to improve the switching off function of a one-way switch, thereby eliminating stiction in the ON-state, (ii) addition of another set of signal lines in order to achieve two-way functionality and (iii) signal line contact surface optimization having three different profiles in order investigate the contact surface profile effect on signal coupling. These lateral switches exhibit a simulated switching time of 0.90 µs, a pull-in voltage of 21 V, with a spring stiffness constant of 17.52 N/m. The proposed switch architectures were designed and fabricated utilizing the PiezoMUMPs MPW process. These switches can be integrated with piezo-actuated LBAW resonators to achieve the required frequency band switching.