Optical and Environmental Characterization Bench for 2D Micromirrors

In this work, we designed and assembled a customized characterization bench for 2D micro scanners with an optical field of view (FoV) of up to 30deg. The optical characterization bench allows for short-, medium- and long-term characterizations under different humidity, gas atmospheres, temperature, or pressure conditions. The mechanical displacement of the mirror under test can be monitored optically and electronically. Fine assessments such as the characterization of nonlinearities or coupling between vibrational modes can be performed in a unique semi-automated setup capable of combining optical and environmental characterizations to assess Micro-Opto-Electromechanical systems (MOEMS) devices, in particular micro-scanners.