Solution Processed Oxide Semiconductors for Flexible Active-Matrix Sensors

Flexible active-matrix sensor arrays have attracted attention for their promising application in soft robotics, health monitoring, and human-machine interfaces. Metal oxide thin film transistors (TFTs) are suitable as the backplane to construct sensor arrays owing to the merits of high mobility, low-temperature processability, and low off-state leakage current. Here, we report a cost-effective solution-processed method to fabricate high-performance metal oxide TFTs. A flexible active-matrix pressure sensor array that can endow robots with tactile perception ability is achieved by integrating the pressure-sensitive materials with oxide TFTs.