MWIR Photodetector Arrays Enhanced by Integration with Si Micropyramidal Structures

Truncated Si micropyramidal arrays with 60 µm pitch are integrated with 10
$\mathrm{x}10$
platinum/silicide Schottky barrier photodetectors with 22
$\mu \mathrm{m}$
square mesas. A four times stronger MWIR photoresponse is observed for micropyramidal arrays compared to the conventional planar photodetectors with the same size.