Finite Element Analysis of PCE Gas Sensor Based on Acoustic Resonator

In this work, Tetrachloroethane (PCE) gas is detected using a gas sensor with a properly designed and FEM-modeled SMFBAR. Parametric sweep analysis is used to find the impact of polyisobutylene polymer layer coating as a sensing material for mass sensitivity. A 1.85µm thick piezoelectric layer (ZnO) is used for the proposed structure. The SMFBAR sensor has been evaluated for tetrachloroethane (PCE) gas detection. An ideal environment's resonance frequency of 1.474 GHz has been measured as a result of FEM modelling with the COMSOL Multiphysics software. Performance of gas sensor has been tested by the exposure of PCE gas with 0–918ppm concentration and improved sensitivity of 3.3 kHz/ppm has been obtained.