A Single-Axis Vortex Gyroscope Using Built-In PZT Micropump

This article presents the development of a single-axis gyroscope that uses vortex flows circulating in a confined space activated by a built-in lead zircona-titanate (PZT) micropump. In this sensor, the deflection of the vortex flow is used as an inertial reference movement to find the angular rate by hotwire anemometry. The vortex gyroscope structure, composed of a pump chamber and rectifying nozzles, generates a net flow to the vortex chamber and then back toward the rectified nozzle for new circulation. After each vibration cycle of the PZT diaphragm, the circulating flow gets stronger to shape a vortex in the vortex flow chamber. Several hotwires are embedded in the vortex chamber for angular rate detection. The experimental result of the gyroscope on the turntable shows that the measured sensitivity for the
${z}$
-axis is about
$13.6 \mu \text{V}$
/°/s. Several parameters affect the sensor’s performance, such as the driving voltage on the PZT diaphragm, the heating current of hotwire, and the effect of the linear acceleration, which are also analyzed and evaluated. Since the structure does not carry any solid-state displacement component nor use the external pump, the present gyroscope is robust.