Ultra-Low Loss Silicon Nitride Waveguides on Monolithic Integrated Photonics Circuits for a Mature 300 mm Wafer Scale Silicon Photonics Platform

We demonstrate silicon nitride waveguides with <0.1 and 0.3 dB/cm loss in nitride and fully integrated photonics wafers, respectively, by employing noble integration techniques while preserving the performance of the other devices of the platform.