Design and simulation analysis of flexible hinge structure in digital micromirror device

Digital micromirror device has the advantage of high resolution, fast response and high robustness which have been used in many significant fields, such as laser machining, optical imaging, photoelectric detection and so on. This work designed a right-circular-hinge digital micromirror device. The angular and linear deformation calculation of the right circular hinge is carried out and simulated. The maximum value of the stress is 305.53 MPa which is less than the ultimate yield strength of hinge materials. The result verified the rationality of the design structure.