Electro-Thermal Coordination Simulation of Microwave Power Matching Load Structure with the FDTD Method

Microwave power matching loads play an important role in impedance matching and system protection. Therefore, it is important to analyze the reliability of microwave power matching loads. In this paper, an accurate electro-thermal coupling method for TaN microwave power matching loads is proposed. The coupling format of transient Maxwell's equations and steady-state heat conduction equations is used for the multiscale characteristics of the response times of these two physical fields. And the numerical implementation based on the domain of the finite-difference time domain (FDTD) method is described in detail. Numerical examples show that the method has high accuracy compared with simulation and provides an effective tool for the design of highly reliable microwave power matching loads.