Case Study of SIMS Analysis on Insulators

SIMS (Secondary Ion Mass Spectrometry) is one of the most sensitive elemental and isotopic surface microanalysis techniques used in semiconductor industry. However, the application of SIMS for surface analysis of insulating materials with charged ions leads to the problem of electrical charge build-up on the sample surface. Thus, charge compensation techniques must be accompanied. There are 3 approaches to solve the charging problem: 1) conductive layer coating; 2) electron flood gun; 3) grounding to the conductive substrate. According to the sample type and severity of electrical charging problem, one, two or all the three compensation methods will be applied.