The Effect of Deposition Temperature on the Morphology and Superconductivity of YBa2Cu3O7-δ Thin Films

This experiment mainly studies the influence of deposition temperature changes on the surface morphology of thin films and tests the effect of temperature on the electrical transport properties of thin films through photolithography and microfabrication technology. By adjusting the deposition temperature, when the temperature increases from $740^{\circ}\mathrm{C}$ to $\boldsymbol{780^{\circ}\mathrm{C}}$, the transition temperature of the thin film was increased from 85 K to 89 K and the critical current density was increased from less than 1 MA/cm² to over 3 MA/cm². However, as the temperature continues to increase to above 790 ${}^{\circ}\mathrm{C}$, the performance of the thin film begins to decrease, which is due to the decomposition of YBCO thin film and the formation of multiple in-plane orientations due to excessive temperature. These experimental results provide a method for controlling the preparation of YBCO thin films with good performance by PLD method.