A 9-mA Integrated Circuit With Programmable Phase-Demodulation Delays for 250-nm-Gauge-Based MEMS Gyroscope With 0.015°/√h Angle Random Walk

The letter presents a sensor including a piezoresistive, nanogauge-based, microelectromechanical system (MEMS) gyroscope with high performance, coupled to an integrated circuit designed in a 130-nm CMOS process. The system works in amplitude-modulated mode-split conditions and features current-feedback instrumentation amplifiers as low-noise front-end stages. The circuit also embeds an automatic quadrature compensation loop and a newly designed programmable demodulation delay chain, with 16-ns steps, to compensate for phase lags introduced in the electromechanical and electronics domains in this operation mode. The circuit draws 9 mA from a 3.6-V supply, with no need for voltage boosting. Coupled with the sensor, it yields 250
$\mu$
dps/√Hz noise with a sub-0.2% linearity error over 225 dps.