Master-slave control of a macro-micro composite platform with feedforward compensation

The macro-micro platform with large stroke and high precision is an important equipment to realize ultra-precision manufacturing. The master-slave collaborative control method dominated by the micro-system can take the advantage of high response speed and high motion accuracy of the micro-system. However, it will magnify the motion error of the overall platform caused by the coupling between the subsystems. This is more obvious when the macro-micro platform starts, stops and reverses its direction. In order to solve this problem, a decoupling control method is proposed in this paper. We design a decoupling controller as a feedforward item to compensate the disturbance from the macro control loop, which improves the overall motion accuracy. The effectiveness and practicability of the proposed method are validated by the experiments of a one-dimensional macro-micro platform.