Modeling and Control of a Piezo-Driven XYZ Series-Type Compliant Nanopositioning Stage

Precision positioning systems are essential for micro-nano scale technology, requiring compactness, large stroke, high accuracy, and motion decoupling in nanopositioning stages for fast and precise positioning. This paper presents a novel piezo-driven XYZ series-type compliant nanopositioning stage, along with its control method. The mechanical design of the stage is briefly described. Based on the hysteresis model and transfer function of the stage system, a control method employing a Bouc-Wen inverse model feedforward controller combined with closed-loop feedback is proposed to compensate for the positioning error. Experiments are conducted to verify the effectiveness of the adopted control method in improving the stage’s performance and achieving precision positioning at the micro-nano scale.