Laser Beam Control Method Based on Model Prediction and Sliding-Mode Dual Closed-Loop Controller

To address the problem that the electrostatic Micro-Electro-Mechanical-System (MEMS) micromirror cannot control the accurate beam deflection due to the torsion beam elastic deformation, mirror surface unevenness and residual vibration in the process of achieving laser beam deflection, a laser beam control method based on model prediction and sliding mode dual closed-loop controller is proposed to achieve fast, accurate and stable laser beam deflection by electrostatic MEMS micromirror. By analyzing the working principle of electrostatic MEMS micromirror, constructing the system model of electrostatic MEMS micromirror, designing the model prediction and sliding-mode dual closed-loop controller, which uses the sliding-mode control law to improve the model prediction controller, using the sliding-mode controller to compensate the controller amount of the model prediction controller, improving the control accuracy and response time of the system, enhancing the robustness of the system, and improving the effectiveness of this control algorithm is verified by step response simulation, tracking performance simulation and robustness simulation. The results show that the dual closed-loop controller has high control accuracy, fast response, good tracking performance and robustness.