An Internal Model Controller for an Electromagnetic Micro-Mirror System

An internal model controller for an electromagnetic micro-mirror (EMSM) system is designed in this paper. The EMSM systems not only have underdamped characteristic, but also contain the hysteresis phenomenon. Considering both linear and hysteresis property of the system, a simple system model for designing controller is applied to describe the EMSM system. Then, based on the built model, an internal model control (IMC) strategy is used to control the deflection of the EMSM system. Finally, the obtained experimental results show the validation of designed scheme.