A New Multi-Dimensional Depletion Concept of Homogenization Field Devices

A new homogenization field device with multi-dimensional depletion (M-HOF) is proposed and experimentally demonstrated in this letter. Periodic elliptical trenches, connected in pairs, are formed in the drift region to replace the conventional discrete circular trenches and introduce the multi-dimensional depletion effect. As a result, the optimized doping concentration of the M-HOF device is increased and the current path is widened by the elliptical trenches, leading to a significant reduction in the specific on-resistance
${R}_{\text {on},{sp}}$
. It has been demonstrated experimentally that the M-HOF device achieved a
${R}_{\text {on},{sp}}$
of only 15.5
$\text{m}\Omega \cdot $
cm2 at a breakdown voltage
${V}_{\text {B}}$
of 436 V, realizing a 21% reduction compared to that of the complementary HOF device under the similar
${V}_{\text {B}}$
.