Phase-Locked and Phase-Tuned Resonant-MOEMS External Cavity QCLs and their Application for Fast and Broadband Mid-Infrared Reflectometry

The combination of broadband quantum cascade lasers (QCLs) with micro-electro-mechanical system (MOEMS) scanners having an integrated diffraction grating as emission-wavelength-selective element enables the realization of very compact, rapidly tuneable, and robust light sources for mid-infrared spectroscopy. In contrast to a motor-driven mechanical grating tuning mechanism, MOEMS scanners do not limit the lifetime of the laser module, as they are made from single-crystalline silicon and undergo no mechanical wear
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