High-Transparency and Heavy-Durability 3D Micro-Optics Made via Ultrafast Laser Lithography Combined with Atomic Layer Deposition and Calcination

Multi-photon lithography realized by a femtosecond laser direct writing in a photopolymer is an ultra-precise optical 3D printing technique enabling additive manufacturing of free-form geometries. It is being established for rapid prototyping and production of miniature optical elements and stacked compound components: diffractive, refractive, guiding, filtering, polarizing, and many other optical functions can be merged into monolith devices with super-wavelength and sub-wavelength features. Currently the multi-photon laser lithography made optics are limited to polymer materials which are low grade in context of optical materials [1].