Resonant Micro-Opto-Mechanical Phase Modulator Fabricated in Glass by a Femtosecond Laser

Information encoding on optical signals is widespread in nowadays technology, ranging from optical fiber links in consumer electronic devices to long-distance communications via fiber networks and biological optical sensing. In many of such diverse applications, the adoption of an integrated-waveguide platform is essential to achieve device miniaturization and to scale-up complexity. Additionally, achieving both rapid and low-loss modulation of the optical phase or intensity is of utmost importance to increase system efficiency or enhance sensitivity. These aspects will also be indispensable to enable the transition to a quantum advantage regime [1], through the use of non-classical states of light, which may be particularly fragile.