Developing Nanosensors with Silicon Nanowires*

This paper discusses reliable fabrication techniques, contamination elimination, and photolithography for silicon nanowire-based sensors. The selection of solvents for contamination removal is discussed. The challenges of integrating SiNWs (silicon nanowires) with honeycomb sensor arrays are also addressed. The successful integration of SiNWs with a sensor array was confirmed through FESEM and IV analysis.