Micromachined Optical Scanner Using Acoustic Radiation Force

This paper reports on a micromachined 1D optical scanner using acoustic radiation force. This novel method allows us to actuate the mirror statically without any electrical connection by means of noncontact repulsive force generated by an acoustic radiator placed more than 2 mm far from the mirror. The optical scanning angle of more than 60 degrees was shown by a fabricated 2 mm square mirror in the experiment.