Sol-gel prepared silica-based materials for sensors and optoelectronic applications

This paper reviews our investigation results on silica-based materials prepared by sol-gel method and their applications. Spin-on glass (SOG) materials (undoped or doped with boron and phosphorus) were prepared and optimized. They were applied to the realization of MOSFET-based chemical sensors. A new technology was invented for the fabrication of sensors by using SOG diffusion source. Eu/sup 3+/-doped silica-titania materials with different refractive indices were also prepared for waveguides. Optical and photo-luminescence measurement results are presented and discussed here.