Surface photo voltage spectroscopy: a powerful technique for characterization of materials and devices

Surface Photovoltage Spectroscopy (SPS) has become an important tool for the characterization of semiconductor materials. Results obtained in the characterization of MoO
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thin films grown onto silicon substrates are presented. We report on an original application of SPS to monitoring the different texturing and passivation processes in manufacturing crystalline silicon solar cells. Results highlight the potentialities of SPS as a simple, contactless, and non-destructive tool for the characterization of semiconductors structures and solar cell devices, allowing to obtain energy transitions, and serving as a guidance in monitoring texturing and passivation processes in solar cells fabrication without the necessity of depositing metal contacts.