Analysis of the Adsorption and Passivation Mechanism of JFCE on Copper Surface in Alkaline CMP Slurry

The mechanism of adsorption and passivation of the non-ionic surfactant fatty alcohol polyoxyethylene ether (JFCE) on copper (Cu) surfaces was investigated by contact angle and Cu surface measurements. The adsorption inhibition model of JFCE on Cu surface was established by scanning electron microscopy (SEM), potential polarization curve and X-ray photoelectron spectroscopy (XPS) analysis, and the adsorption and passivation mechanism of JFCE as a surfactant in glycine-based alkaline Cu polishing slurry was reasonably revealed.