A Simulation of Noble Gas in Reaction Chamber Based on Direct Simulation Monte Carlo

A self-developed Direct Simulation Monte Carlo (DSMC) simulation has been used to model the noble gas in plasma reaction chamber. A Delaunay triangle mesh generator based on Point Insertion Method is completed to improve the adaptability and DSMC code is coupled with unstructured mesh by a new position sample method in triangle and an efficient particle orientation and location technique. After several verification cases, a typical showerhead Chemical Vapor Deposition is modeled and results are shown to illustrate the characteristics of expansion region.