Four-Port SOLR Calibration Algorithm for Symmetric GSSG Probes

This paper proposes an efficient four-port short-open-load-reciprocity (SOLR) calibration algorithm for the symmetric Ground-Signal-Signal-Ground (GSSG) probes used for on-wafer S-parameter testing. This algorithm only needs four measurements, including one reciprocal Thru and three traditional calibration standards including Open, Short, and Load. Additionally, the exact S-parameters of the Thru are not mandatorily required. The correctness and effectiveness of the proposed algorithm is validated and corroborated by full-wave simulations up to 100 GHz.