Ultraprecise Printing of D-Band Transmission Lines

This letter discusses the fabrication of coplanar waveguide (CPW) transmission lines by ultraprecise deposition (UPD) and their characterization in the
$D$
-band (110–170 GHz). UPD is a direct printing process for the deposition of functional nanoinks. It has recently been introduced by XTPL as an alternative to aerosol jet and ink jet printing techniques. In UPD, a micrometer-scale nozzle is in direct contact with the substrate that is printed on. This approach allows the application of highly viscous nanoinks. A silver-filled ink with a viscosity exceeding
$10^{5} $
mPa
$\cdot \text{s}$
is used in combination with a nozzle opening size of
$5~\mu \text{m}$
to print CPWs with an air gap of
$10~\mu \text{m}$
on Corning 1737 display glass and fused silica substrates. The lateral precision of the printing process is approximately 1–
$2~\mu \text{m}$
. To de-embed the transmission line performance, thru–reflect–line (TRL) calibration standards were manufactured on substrate. For a single, 400-nm-thick layer of the cured nanoink, the CPWs show approximately 1.0 dB/mm of loss at 140 GHz on fused silica and broadband transmission in the entire
$D$
-band.