Optical Scanning Analysis of Static Samples by Compact Laser Induced Breakdown Spectroscopy

In the field of quantitative analysis utilizing laser induced breakdown spectroscopy (LIBS), ensuring the stability and precision of the technique is a crucial consideration. This is particularly pertinent for certain engineering applications, where utilizing electric translation stages for sample scanning is not feasible. In this study, a compact optical scanning LIBS analysis system was developed using a deflection mirror design to replace the translation platform. The system achieved rapid scanning and precise analysis, with a total weight of less than 5 kg. Moreover, to quantitatively analyze Mn, Ni, Cr, Cu, and other elements in various alloy steels, a general method for selecting spectral analysis line combination was proposed. The calibration model was established utilizing 16 alloy steel samples, and its validity was assessed through a verification set of seven samples (with element content ranging from 0.021 to 2.0 wt%). The results indicate a high degree of accuracy. The calibration model determination coefficients (
$R^{2}$
) for Mn, Ni, Cr, and Cu elements exceeded 0.99. The root-mean-square error of validation (RMSEV) was less than 0.05, and the relative standard deviation (RSD) was not more than 4%. Additionally, the relative prediction errors for Mn range from 2.98% to 67.44%, for Ni range from 0.57% to 15.93%, for Cr range from 3.91% to 55.56%, and for Cu range from 0.95% to 38.1%.