CMOS Image Sensor With Micro–Nano Holes to Improve NIR Optical Efficiency: Holes on Top Surface Versus on Bottom

We study the nano- and micro-structures that increase the optical efficiency (OE) of the complementary metal oxide semiconductor (CMOS) image pixels in visible and infrared. We consider the difference between the micro-holes at the pixels’ bottom and the top and the holes that are composed of smaller holes. Those solutions can facilitate the fabrication. We study the crosstalk and the OE dependence on the angle of incident of light and numerical aperture (NA) for the pixels in a camera setup.