A Flexible Microstructured Pressure Sensor With High Performance Based on Vertically Aligned Carbon Nanotubes and Ion Gel

Herein, we present a novel microstructured capacitive pressure sensor, integrating photolithography techniques and advanced materials, such as vertically aligned multiwall carbon nanotubes (VA-MWCNTs) and ion gel. The introduction of micropyramidal electrodes and microhemispheric electrolyte with poly(vinyl alcohol)/phosphoric acid (H
₃
PO
₄
) ion gel demonstrates a significant improvement in sensitivity (124.9 kPa
⁻¹
) and response time (125 ms). Furthermore, the application of VA-MWCNTs coated with parylene-C improves the electrode's durability and confers remarkable repeatability on the entire system under various pressure conditions. This superior performance in both static and dynamic measurements positions the sensor as a promising candidate for health monitoring applications.