A Defect-Based MEMS Phononic Crystal Slab Waveguide in Electronic Circuits

Micro-Electro-Mechanical Systems (MEMS) entered the frequency and timing control world in the late 90’s and since then a rapid spread of novel and high-performance solutions have been experienced to respond to the market requests. In particular, Phononic Crystals (PnC), which are defined as periodic materials with extraordinary properties in terms of guiding, isolation, focusing and steering of elastic and acoustic waves, have been recently proposed as an intriguing ingredient in the design of MEMS circuits. In this work, we propose a novel electro-mechanical circuit able to efficiently couple two High Frequency (HF) MEMS resonators through a defect based PnC MEMS waveguide. In particular, we prove both numerically and experimentally the efficient coupling of an input and an output MHz MEMS capacitive resonator oscillating according to both an in-plane and out-of-plane flexural mode. [2023-0050]