Planar On-Silicon Inductor Design for Electromagnetic Tracking

In this article, a planar on-silicon inductor design for electromagnetic tracking (EMT) is presented. The design process has been demonstrated for a planar sensing coil in a 65-nm on-silicon process. The designed multilayer planar inductor configuration achieves SNR of 23.6 dB and sensitivity of 202
$\mu \text{V}$
/T/Hz. The designed inductor satisfies system requirements for clinical use in EMT applications. The current design has been verified on the Taiwan Semiconductor Manufacturing Company (TSMC) 65-nm process and exhibits a close correlation with simulation results. Measured SNR of 22.1 dB and sensitivity of 198
$\mu \text{V}$
/T/Hz at a frequency of 20 kHz and magnetic flux density of 150 nT is achieved. An improved lumped element model to account for multilayer planar inductor designs is also proposed.