Mems Quadrupole Mass Spectrometer

This paper presents a novel approach to the development of a MEMS-based Quadrupole Mass Spectrometer. The instrument consists of a 3D-printed, compact chip-like package containing MEMS components required to perform the gas analysis. Obtained mass range between 1 and 150 u and a resolution of 45, makes it ideal for a range of applications which does not require high-end performance. Our work demonstrates that MEMS technology in conjunction with novel 3Dp fabrication techniques offers a feasible route to developing compact mass spectrometers, providing an opportunity for researchers to create portable, yet potent instruments for a range of applications, opening new possibilities for on-site, real-time analysis in many different fields.