2.5D Technology based on Vertically Aligned Carbon Nanotubes for MM-Waves Passive Devices

An original 2.5 technology based on vertically aligned Carbon Nanotubes (VACNTs) to produce millimeter-waves Air-Filled WaveGuide (AFWG) structures is described in this paper. The design of AFWG is based on bundle of VACNTs acting as WG’s metallic lateral walls. A CMOS compatible CNTs process is developed to fabricate the WG using a dedicated assembly process. Raman spectroscopy and molecular dynamics are applied to study the effects of the CNTs compression during the fabrication process. An example of the realization of a V band AFWG is presented together with S-parameters measurements which validate the concept of VACNTs-based AFWG. In addition, the experimental attenuation constant is estimated at 0.5 dB/mm between 81–86 GHz.