Upcoming Challenges of ESD Reliability in DTCO with BS-PDN Routing via BPRs

In this paper, the impact of double-sided connectivity and buried power rails (BPR) on electrostatic discharge (ESD) diodes is reported. Connection from the backside and BPRs can change ESD current path and uniformity. It also introduces parasitic capacitance and layout penalty to ESD diodes. The ESD performance is strongly dependent on layout styles. Guidelines for a better layout style of double-sided connectivity cooperating with BPRs are proposed.