Spatial Airflow Impact Source Positioning System Based on MEMS Pressure Sensor Arrayed on Flexible Substrate

Spatial airflow impact source localization is vital for security detection, which lack of effective positioning technology. Herein, this article presents a spatial airflow impact source positioning system based on microelectromechanical system (MEMS) pressure sensor array. A piezoresistive pressure sensor with a sensitivity of 28 mV/MPa is fabricated by the MEMS technology. To position the airflow impact source accurately, we array the MEMS pressure sensors on a flexible and wearable substrate. Four arrayed sensors are essential for positioning a spatial airflow impact source, and the experimental results demonstrate the feasibility of the scheme with coordinates errors (
${X}$
: 1.93 mm,
${Y}$
: 2.29 mm, and
${Z}$
: 3.30 mm). AIso, we develop a
$3\times3$
type pressure sensors array structure to enhance the positioning accuracy, which improves the triaxial coordinates localization accuracy 96.9%, 87.8%, and 74.9%, respectively. This work provides a reliable method for spatial airflow impact source accurately positioning with a potential application of wearable devices.