Development of integral passive components for multilayer organic MCMs at millimeter wave frequencies

We present the design and development of Ta/sub 2/N thin-film resistors for the multilayer organic multichip module (MCM) at microwave and millimeter wave frequencies. The Ta/sub 2/N thin-film resistors are integrated directly onto multilayer Kapton films and achieve a resistivity of 12.5 /spl Omega//sq. to 25 /spl Omega//sq. Several Ta/sub 2/N thin-film resistor structures have been fabricated and electrically characterized up to 50 GHz to develop design rules for this process. For the first time, an ultra-wide band terminator has been developed and integrated on Kapton flex using Ta/sub 2/N thin-film resistors. The measured results of this circuit demonstrate a return loss of less than 20-dB over a 50-GHz bandwidth.