Proposal For A Vacuum Thermal Evaporation Deposition Monitoring System Using Fuzzy Models And AI Elements

This paper presents a fuzzy model of a physical deposition monitoring system using AI (Artificial Intelligence) elements. The studied process for thin film deposition is thermal evaporation method. The fuzzy model is proved by both a thermocouple for temperature monitoring and by a digital camera with AI algorithms that can measure the dimensions of the melted material that is evaporated.