TCAD Device Simulation With Graph Neural Network

There is an increasing number of studies to accelerate the TCAD simulation with deep learning models. Such studies rely on performing a procedure that interpolates an unstructured mesh into a structured mesh. This procedure, however, incurs intrinsic errors and redundant computation. To avoid this unnecessary procedure, this letter proposes a new method that can treat unstructured mesh itself to mimic TCAD device simulation. The method is to convert the unstructured mesh into a graph and then, directly applies a novel graph neural network (MHAT-GNN). In 45nm process, the proposed method outperforms pre-existing methods in terms of accuracy and efficiency.