Conditions for the Chaotic Oscillations of Size-Dependent Planar Components of MEMS/NEMS Sensors

In the present work, the mathematical model of the dynamic deformation of the size-dependent planar MEMS/NEMS components were constructed. The equations of motion were obtained based on the fully corrected gradient nonlocal theory and the third-order shear deformation plate theory. The nanoplate is considered as a size-dependent isotropic thin plate. The constructed mathematical model of the dynamic deformation of the size-dependent planar components of the sensors is significantly nonlinear, because of that, chaotic oscillations are possible even if the driving force is defined by deterministic law. The stability conditions were formulated.