Crossed Anisotropy Multilayered Nanogranular Films Combining High Permeability, Ferromagnetic Resonance Frequency, and Resistivity

In-plane isotropic crossed anisotropy multilayer for high-frequency magnetics was fabricated using in-plane uniaxial anisotropic nanogranular film owing to its high permeability, ferromagnetic resonance (FMR) frequency, and electrical dc resistivity. The multilayer exhibited in-plane isotropy and enabled us to combine permeability of approximately 100, FMR frequency of approximately 3 GHz, and resistivity of approximately
$5 ~\mu \Omega \cdot \text {m}$
. Moreover, a low damping factor of 0.0148 was obtained; hence the multilayer is available for a low loss of up to 1 GHz. Meanwhile, the underlayer and cap layer were necessary for improving the isotropy of the multilayer. The results can be attributed to the interfacial stress.