Inductor Synthesis Technique Based on Surrogate Modeling

Development results of the inductor synthesis technique are presented. User may set requirements to inductance and self-resonance frequency. Output space mapping and kriging interpolation are used to get surrogate model in presented technique. Combination of these methods allow us to predict main inductor characteristics in specified range of the geometry parameters. A suggested technique workflow is demonstrated by synthesis two inductors with different number of turns based on 0.15
$\boldsymbol{\mu}\mathbf{m}$
GaAs pHEMT process. Obtained surrogate model allow us to predict inductor characteristics for different geometry parameters in range for inner radius from 30
$\boldsymbol{\mu}\mathbf{m}$
to 200
$\boldsymbol{\mu }\mathbf{m}$
, line width from 10
$\boldsymbol{\mu}\mathbf{m}$
to 15
$\boldsymbol{\mu }\mathbf{m}$
, and for 1.5 and 6.5 turns. 28 coarse models and 10 fine models for each number of turns was used to build surrogate-model. A synthesized inductors with different number of turns was manufactured and measured. The EM simulation and measurement deviation is less than 3% on selected frequency.