An On-chip Vacuum Transistor Based on a Multiwalled Carbon Nanotube*

Vacuum transistors fabricated by microfabrication technologies have gained attention recently. A vacuum transistor based on field-assisted thermionic emission from a single carbon nanotube is an emerging on-chip vacuum transistor. The device exhibits an ON/OFF current ratio as high as 104, with a subthreshold slope of $\mathbf{\sim 4}\mathbf{V\cdot }\mathbf{dec^{-1}}$. Benefiting from field-assisted thermionic emission mechanism, it displays stable emission performances at ~10^-2Pa. Herein, the essential results of this novel vacuum transistor are summarized.