Design and Simulation for Three-Dimensional Integrated Electron Optics System

An integrated electron gun with the three-layer nine-beam array is designed based on the grid loaded method, which is a universal method to obtain multi-beam gun with narrow beam separation by one-dimensional (in y direction) compression. The characteristic of an integrated electron gun is
$U_{a}=22\text{kV}, I=9\times 0.15$
A. Then, a novel scheme of a three-layer with nine-beam array sharing a focusing structure is proposed to realize the stable transmission of nine-beam array, which can reduce the volume of VEDs and improve the power density. By continuously adjusting the relative positions of the integrated electron gun and the focusing structure along the z direction, a good matching state can be obtained with high beam transmission rate. The nine-beam array can transport 70 mm stably with the transmission rate of 98.6%.