Development of Nitride-Based Optical Phased Array at 1092 nm for the Optical Addressing of 88Sr+ Ion

Optical phased array (OPA) structures are designed and fabricated for the optical addressing of trapped
⁸⁸
Sr
⁺
ions. Laser light of 1092 nm wavelength corresponding to the
$^{2}\text{D}_{3/2}$
to
$^{2}\text{P}_{1/2}$
of
⁸⁸
Sr
₊
ion is used, where silicon nitride (SiN) platform with integrated titanium nitride (TiN) thermos-optic heaters are selected. Beam steering of
$\sim 33~\mu \text{m}$
, which corresponds to ~11.6° steering angle, is obtained by applying 10V on alternative TiN heaters in the 8-Channel OPA structure.