A Differential Broadband Single-Sweep 70 kHz-220 GHz Wafer-Level System: First Calibration and Measurement Characteristics

Broadband network analysis measurement are increasingly needed in 4-port and differential contexts. A GSGSG probe design and system capable of 70 kHz-220 GHz single-sweep measurements are presented that show similar raw losses (VNA port to probe tip) and measurement repeatability characteristics to two port measurements. Intra-probe coupling may be playing an uncertainty role at higher frequencies and conversion to mixed-mode parameters show changes in the repeatability statistics that may be related to correlations of the repeatability variances.