Traceable Lumped-Element Calibrations up to 110 GHz on Commercial Calibration Substrates

In this paper we report for the first time on progress towards establishing traceability for on-wafer measurements of planar devices using fixed-distance 1 umped-element calibrations on a commercially available coplanar calibration substrate. The uncertainty budget includes instrumentation errors, connector repeatability and calibration standard uncertainties. Preliminary results are shown for verification devices embedded in the commercial calibration substrate.