Research on Transfer Printing Process Optimization for Flexible Piezoelectric Energy Harvester

With the rise and development of flexible energy harvester, transfer printing has become the key technology affecting the success rate of flexible energy harvester manufacturing. And some brittle micro structures are very easy to fail in the complex transfer printing, resulting in the transfer success rate has been very low. In this paper, optimized seal transfer printing process is proposed, and the transfer release time is shorten to 10min by studying the influence of different sacrificial layer materials and different ratios of corrosion liquid on the release time of the structure from the rigid substrate, meanwhile, the corrosion resistance of the photoresist protective layer is improved by studying the influence of different coating rotation speed on the glue floating time, then, through the above work, the success rate of the seal transfer printing process is improved.